Energy Saving System for Air Conditioning of Clean Room for Semiconductor Factory (Estimation of FMU System)
نویسندگان
چکیده
The total power consumption of all semiconductor plants exceeds 100 million kWh per year, with about 43% of this consumption to operate air conditioning facilities. This high power consumption is due to the requirement of the cleanliness kept for clean rooms, with extremely high power consumed to the air transferring power. Oki developed the fan module unit (FMU) type air conditioning system to decrease the air transferring power, in overall vertical laminar flow type clean rooms. We installed this system in the latest semiconductor manufacturing plants. This air conditioning system has an improved FMU type fan, and considerably decreased running costs to about 53% of the recycle fan type. The air transferring power of this FMU air conditioning system is 6.5W/CMM (m3/min). We also designed an air conditioning system without air conditioning ducts, which implemented saving energy, saving resources and maintenance savings, contributing to environmental protection.
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